Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
Author:
Affiliation:
1. Department of Materials Science and Engineering, Yonsei University, 50, Yonsei-ro Seodaemungu, Seoul 03722, Republic of Korea
2. BIO-IT Micro Fab Center, Yonsei University, 50, Yonsei-ro Seodaemungu, Seoul 03722, Republic of Korea
Funder
ASM Genitech Korea Ltd.
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5085801
Reference26 articles.
1. Compositional Analysis and Capacitance‐Voltage Properties of TiO2 Films by Low Pressure Metal‐Organic Chemical Vapor Deposition
2. Tailoring the Pore Size and Architecture of CeO2/TiO2Core/Shell Inverse Opals by Atomic Layer Deposition
3. Enhancing Raman Scattering without Plasmons: Unprecedented Sensitivity Achieved by TiO2 Shell-Based Resonators
4. Growth and Crystallization of TiO2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication of Aluminum Oxide Thin-Film Devices Based on Atomic Layer Deposition and Pulsed Discrete Feed Method;Micromachines;2023-01-21
2. Enhancing chemisorption efficiency and thin-film characteristics via a discrete feeding method in high-k dielectric atomic layer deposition for preventing interfacial layer formation;Journal of Materials Chemistry C;2023
3. Role of dose optimization in Ru atomic layer deposition for low resistivity films;Journal of Vacuum Science & Technology B;2023-01
4. Atomic layer deposition of titanium oxide thin films using a titanium precursor with a linked amido-cyclopentadienyl ligand;Journal of Materials Chemistry C;2022
5. Atomic layer deposition of titanium dioxide films using a metal organic precursor (C12H23N3Ti) and H2O (DI water);Journal of Alloys and Compounds;2021-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3