Low pull-in voltage graphene electromechanical switch fabricated with a polymer sacrificial spacer
Author:
Affiliation:
1. School of Materials Science, Japan Advanced Institute of Science and Technology, Nomi 923-1211, Japan
2. Nano Research Group, Faculty of Physical Sciences and Engineering, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom
Funder
Japan Society for the Promotion of Science (JSPS)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4891055
Reference18 articles.
1. Nanoelectromechanical contact switches
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3. A nanomechanical switch for integration with CMOS logic
4. All graphene electromechanical switch fabricated by chemical vapor deposition
5. Suspended few-layer graphene beam electromechanical switch with abrupt on-off characteristics and minimal leakage current
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