Ultra-sensitive graphene membranes for microphone applications-Reference-Cited by-同舟云学术

Ultra-sensitive graphene membranes for microphone applications

Published:2023 Issue:13 Volume:15 Page:6343-6352
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Baglioni Gabriele¹^ORCID,Pezone Roberto²,Vollebregt Sten²,Cvetanović Zobenica Katarina³^ORCID,Spasenović Marko³^ORCID,Todorović Dejan⁴,Liu Hanqing⁵,Verbiest Gerard J.⁵,van der Zant Herre S. J.¹^ORCID,Steeneken Peter G.¹⁵

Affiliation:

1. Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands

2. Laboratory of Electronic Components, Technology and Materials, Delft University of Technology, The Netherlands

3. Center for Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Serbia

4. Dirigent Acoustics Ltd, Belgrade, Serbia

5. Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands

Abstract

We investigate the sound response of graphene membranes via laser Doppler vibrometry. We show that graphene's mechanical compliance is superior to that of MEMS devices and thus can enable the fabrication of smaller and more performant microphones.

Funder

European Commission

Ministarstvo Prosvete, Nauke i Tehnološkog Razvoja

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2023/NR/D2NR05147H

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