Measurement of mechanical properties of three-dimensional nanometric objects by an atomic force microscope incorporated in a scanning electron microscope
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1488150
Reference17 articles.
1. Atomic Force Microscope
2. Materials’ properties measurements: Choosing the optimal scanning probe microscope configuration
3. A method for determining the spring constant of cantilevers for atomic force microscopy
4. A novel AFM/STM/SEM system
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