Enhanced boron diffusion in excimer laser preannealed Si-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Enhanced boron diffusion in excimer laser preannealed Si

Published:2005-04-11 Issue:15 Volume:86 Page:151902
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Monakhov E. V.,Svensson B. G.,Linnarsson M. K.,La Magna A.,Spinella C.,Bongiorno C.,Privitera V.,Fortunato G.,Mariucci L.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1899765

Reference20 articles.

1. Redistribution of dopants in ion‐implanted silicon by pulsed‐laser annealing

2. Macroscopic theory of pulsed-laser annealing. II. Dopant diffusion and segregation

3. Excimer laser annealing of ion‐implanted silicon

4. Improved Characteristics ofp+-nJunctions formed by Excimer Laser Annealing with Low Temperature Pre-Annealing

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low-temperature activation of boron ion in silicon substrate using B10H14 + cluster and by soft X-ray irradiation;Japanese Journal of Applied Physics;2018-10-12

2. Low-Temperature Activation in Boron Ion-Implanted Silicon by Soft X-Ray Irradiation;IEICE Transactions on Electronics;2016

3. Formation of shallow boron emitters in crystalline silicon using flash lamp annealing: Role of excess silicon interstitials;Applied Physics Letters;2015-07-13

4. Ion Implantation Defects and Shallow Junctions in Si and Ge;Semiconductors and Semimetals;2015

5. Deuterium diffusion and trapping in hydrothermally grown single crystalline ZnO;Applied Physics Letters;2008-10-13

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3