The correlation between the radial distribution of high-energetic ions and the structural as well as electrical properties of magnetron sputtered ZnO:Al films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4840975
Reference26 articles.
1. Transparent Conductive Zinc Oxide
2. Electrical Properties
3. Reactive magnetron sputtering of transparent conductive oxide thin films: Role of energetic particle (ion) bombardment
4. Magnetron Sputtering of ZnO Films
5. Influence of Energetic Oxygen Bombardment on Conductive ZnO Films
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