The correlation between the radial distribution of high-energetic ions and the structural as well as electrical properties of magnetron sputtered ZnO:Al films-Reference-Cited by-同舟云学术

The correlation between the radial distribution of high-energetic ions and the structural as well as electrical properties of magnetron sputtered ZnO:Al films

Published:2013-12-14 Issue:22 Volume:114 Page:223716
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Bikowski André,Welzel Thomas,Ellmer Klaus

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4840975

Reference26 articles.

1. Transparent Conductive Zinc Oxide

2. Electrical Properties

3. Reactive magnetron sputtering of transparent conductive oxide thin films: Role of energetic particle (ion) bombardment

4. Magnetron Sputtering of ZnO Films

5. Influence of Energetic Oxygen Bombardment on Conductive ZnO Films

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