Improvement of the uniformity of structural and electrical properties of transparent conductive Al-doped ZnO thin films by inductively coupled plasma-assisted radio frequency magnetron sputtering-Reference-Cited by-同舟云学术

Improvement of the uniformity of structural and electrical properties of transparent conductive Al-doped ZnO thin films by inductively coupled plasma-assisted radio frequency magnetron sputtering

Published:2023-03 Issue: Volume:769 Page:139752
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Mian Md. Suruz^ORCID,Nakano Takeo,Okimura Kunio

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference73 articles.

1. Frontier of transparent conductive oxide thin films;Hosono;Vacuum,2002

2. Transparent conducting oxides—an up-to-date overview;Stadler;Materials,2012

3. Transparent conductive oxides;Hosono,2017

4. Indium tin oxide thin films for organic light-emitting devices;Kim;Appl. Phys. Lett.,1999

5. Transparent and conducting ITO films: new developments and applications;Granqvist;Thin Solid Films,2002

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