Direct observation of the etching of damaged surface layers from natural diamond by low‐energy oxygen ion bombardment
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111183
Reference16 articles.
1. On the role of oxygen and hydrogen in diamond‐forming discharges
2. Effects of oxygen and pressure on diamond synthesis in a magnetoactive microwave discharge
3. Effect of oxygen in diamond deposition at low substrate temperatures
4. Effects of oxygen on diamond growth
5. Etching of diamond with argon and oxygen ion beams
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4. Etching Damage in Diamond Studied Using an Energy-Controlled Oxygen Ion Beam;Japanese Journal of Applied Physics;2007-01-10
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