Effect of Si and C concentration on the microstructure, and the mechanical, tribological and electrochemical properties of nanocomposite TiC/a-SiC:H/a-C:H coatings prepared by plasma enhanced chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3684602
Reference38 articles.
1. High-power impulse magnetron sputtering of Ti–Si–C thin films from a Ti3SiC2 compound target
2. Structural, electrical, and mechanical properties of nc-TiC∕a-SiC nanocomposite thin films
3. Structural and mechanical properties of TiC and Ti–Si–C films deposited by pulsed laser deposition
4. Wear protective coatings consisting of TiC–SiC–a-C:H deposited by magnetron sputtering
5. Electronic structure investigation ofTi3AlC2,Ti3SiC2, andTi3GeC2by soft x-ray emission spectroscopy
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