Structural, electrical, and mechanical properties of nc-TiC∕a-SiC nanocomposite thin films-Reference-Cited by-同舟云学术

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Structural, electrical, and mechanical properties of nc-TiC∕a-SiC nanocomposite thin films

Published:2005 Issue:6 Volume:23 Page:2486
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Eklund P.,Emmerlich J.,Högberg H.,Wilhelmsson O.,Isberg P.,Birch J.,Persson P. O. Å.,Jansson U.,Hultman L.

Publisher

American Vacuum Society

Subject

General Engineering

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