Dense and hard TiWC protective coatings grown with tungsten ion irradiation using WC-HiPIMS/TiC-DCMS co-sputtering technique without external heating
Author:
Funder
VINNOVA
Vetenskapsrådet
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference65 articles.
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4. On the control of deposition process for enhanced mechanical properties of nc-TiC/aC: H coatings with DC magnetron sputtering at low or high ion flux;Souček;Surf. Coat. Technol.,2014
5. The plasma-assisted chemical vapour deposition of TiC, TiN and TiCxN1− x;Archer;Thin Solid Films,1981
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