Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl2+ and Cl+ densities
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1288156
Reference17 articles.
1. Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions
2. Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry
3. Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas
4. An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell
5. Negative ion density in inductively coupled chlorine plasmas
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