Ellipsometric examination of optical property of the Si–SiO2 interface using the s-wave antireflection
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.369253
Reference13 articles.
1. Surface roughness at the Si(100)-SiO2interface
2. High-resolution electron microscopy of structural features at the interface
3. Silicon oxidation and Si–SiO2 interface of thin oxides
4. Influence of oxidation parameters on atomic roughness at the Si‐SiO2interface
5. Optical Evidence for a Silicon‐Silicon Oxide Interlayer
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