Perspective: Is there a hysteresis during reactive High Power Impulse Magnetron Sputtering (R-HiPIMS)?
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4976717
Reference73 articles.
1. Hysteresis-free reactive high power impulse magnetron sputtering
2. Dynamic behaviour of the reactive sputtering process
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4. Fundamental understanding and modeling of reactive sputtering processes
5. Upgrading the “Berg-model” for reactive sputtering processes
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