Organization of silicon nanocrystals by localized electrochemical etching
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3247884
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1. Si single electron tunneling transistor with nanoscale floating dot stacked on a Coulomb island by self-aligned process
2. A silicon nanocrystals based memory
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1. Ordered arrays of Si and Ge nanocrystals via dewetting of pre-patterned thin films;Journal of Applied Physics;2013-02-14
2. Silicon nitride nanotemplate fabrication using inductively coupled plasma etching process;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-09
3. Recent Progress in the Understanding of Si-Nanostructures Formation in a-SiNx:H Thin Film for Si-Based Optoelectronic Devices;Solid State Phenomena;2011-05
4. Formation of p-Silicon Wire by Electrochemical Etching Using Positive Photoresist as an Etch Mask in Organic Electrolyte;Electrochemical and Solid-State Letters;2011
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