Silicon nitride nanotemplate fabrication using inductively coupled plasma etching process-Reference-Cited by-同舟云学术

Silicon nitride nanotemplate fabrication using inductively coupled plasma etching process

Published:2011-09 Issue:5 Volume:29 Page:051802
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Ayari-Kanoun Asma,Jaouad Abdelatif,Souifi Abdelkader,Drouin Dominique,Beauvais Jacques

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3628593

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