Extremely low resistivity erbium ohmic contacts ton‐type silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.101611
Reference8 articles.
1. Size Effect on Contact Resistance and Device Scaling
2. Thin films of rare-earth metal silicides in microelectronics
3. The Schottky‐barrier height of the contacts between some rare‐earth metals (and silicides) andp‐type silicon
4. Contact Resistance and Contact Resistivity
5. Models for contacts to planar devices
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