Effects of discharge parameters on deposition rate of hydrogenated amorphous silicon for solar cells from pure SiH4plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339771
Reference31 articles.
1. Recent advances in amorphous silicon solar cells
2. Deep‐level traps in low‐dose boron‐implanted and low‐temperature annealed silicon
3. Glow-Discharge Deposition of a-Si: H from Pure Si2H6and Pure SiH4
4. Bias effects on the deposition of hydrogenated amorphous silicon film in a glow discharge
5. Radical species in argon‐silane discharges
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