Role of light scattering in excimer laser annealing of Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1906318
Reference10 articles.
1. Dopant redistribution and electrical activation in silicon following ultra-low energy boron implantation and excimer laser annealing
2. Laser thermal processing using an optical coating for ultra shallow junction formation
3. Material modifications induced by laser annealing in two-dimensional structures
4. Solute trapping and solute drag in a phase-field model of rapid solidification
5. Solidification of binary alloys: Thermal effects studied with the phase-field model
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