Calculation of Deposition Profiles and Compositional Analysis of Cosputtered Films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1661378
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1. The ?multiple-sample concept? in materials research: Synthesis, compositional analysis and testing of entire multicomponent systems
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3. Momentum Transfer in Sputtering by Ion Bombardment
4. Angular Distribution of Sputtered Material
5. Re‐emission Coefficients of Si and SiO2 Films Deposited through rf and dc Sputtering
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