Improved solid phase epitaxial growth of lithium tantalate thin films on sapphire, using a two‐step metalorganic chemical‐vapor deposition process
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110409
Reference14 articles.
1. Lithium niobate: Summary of physical properties and crystal structure
2. Characteristics of periodically domain‐inverted LiNbO3and LiTaO3waveguides for second harmonic generation
3. Solid‐phase epitaxial growth of lithium tantalate thin films deposited by spray‐metalorganic chemical vapor deposition
4. Improvements in the heteroepitaxy of GaAs on Si
5. Minority‐carrier lifetime measurements and defect‐structure identification for gallium arsenide grown on sapphire by organometallic vapor phase epitaxy
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2. Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO3-on-Insulator (LTOI) Substrate for a SAW Resonator;ACS Applied Electronic Materials;2019-07-12
3. Toward High-Quality Epitaxial LiNbO3and LiTaO3Thin Films for Acoustic and Optical Applications;Advanced Materials Interfaces;2017-03-03
4. Dielectric and pyroelectric properties of ultrathin, monocrystalline lithium tantalate;Infrared Physics & Technology;2014-03
5. Double metal alkoxides of lithium: Synthesis, structure and applications in materials chemistry;Coordination Chemistry Reviews;2012-05
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