Low‐energy oxygen ion bombardment effect on BaTiO3thin films grown by multi‐ion‐beam reactive sputtering technique
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109944
Reference11 articles.
1. Revised structure zone model for thin film physical structure
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4. Modification of niobium film stress by low‐energy ion bombardment during deposition
5. Substrate Temperature Dependence of Oblique Incidence Anisotropy in Fe Films
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