Adsorption and desorption kinetics for SiCl4 on Si(111)7×7
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.458868
Reference27 articles.
1. Chemical Processes in Vapor Deposition of Silicon: II . Deposition from and
2. The chemistry and transport phenomena of chemical vapor deposition of silicon from SiCl4
3. Chemical Processes in Vapor Deposition of Silicon: I . Deposition from and Etching by
4. Surface diffusion of hydrogen on Ru(001) studied using laser‐induced thermal desorption
5. Desorption kinetics of hydrogen and deuterium from Si(111) 7×7 studied using laser‐induced thermal desorption
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