Author:
Alvarez A.‐L.,Calle F.,Sacedón A.,Calleja E.,Muñoz E.,Wagner J.,Maier M.,Mazuelas A.,Ploog K. H.
Subject
General Physics and Astronomy
Cited by
1 articles.
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1. Co-implantation of Al+, P+, and S+ with Si+ implants into In0.53Ga0.47As;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-09