Reconstruction of the static magnetic field of a magnetron
Author:
Affiliation:
1. Institute for Theoretical Electrical Engineering, Center for Plasma Science and Technology, Ruhr University Bochum, D-44780 Bochum, Germany
Funder
Deutsche Forschungsgemeinschaft
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5024983
Reference12 articles.
1. Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges
2. Magnetron sputtering: basic physics and application to cylindrical magnetrons
3. Magnetron sputtering: a review of recent developments and applications
4. A novel pulsed magnetron sputter technique utilizing very high target power densities
5. Tutorial: Physics and modeling of Hall thrusters
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