Engineering titanium and aluminum oxide composites using atomic layer deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3667134
Reference42 articles.
1. Hybrid titanium–aluminum oxide layer as alternative high-k gate dielectric for the next generation of complementary metal–oxide–semiconductor devices
2. Low cost surface passivation for p-type mc-Si based on pseudobinary alloys (Al2O3)x(TiO2)1−x
3. Influence of TiO2 incorporation in HfO2 and Al2O3 based capacitor dielectrics
4. Formation of crystalline Al–Ti–O thin films and their properties
5. The optical properties of monolayer amorphous Al2O3–TiO2 composite films used as HT-APSM blanks for ArF immersion lithography
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