Hybrid titanium–aluminum oxide layer as alternative high-k gate dielectric for the next generation of complementary metal–oxide–semiconductor devices
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1856137
Reference11 articles.
1. Alternative Gate Dielectrics for Microelectronics, edited by R. M. Wallace and G. Wilk, MRS Bull.MRSBEA0883-7694 27, (3) (2002).
2. Band offsets of wide-band-gap oxides and implications for future electronic devices
3. Materials science and integration bases for fabrication of (BaxSr1−x)TiO3 thin film capacitors with layered Cu-based electrodes
4. STUDIES OF MULTICOMPONENT OXIDE FILMS AND LAYERED HETEROSTRUCTURE GROWTH PROCESSES VIA IN SITU, TIME-OF-FLIGHT ION SCATTERING AND DIRECT RECOIL SPECTROSCOPY
5. Oxygen 1sx-ray-absorption edges of transition-metal oxides
Cited by 83 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effects of Zn doped MoO3 nanocomposite interlayer on electrical and surface chemical state properties of Ni/Cr/n-GaN Schottky junction;Materials Science and Engineering: B;2024-10
2. Preparation of Low-Temperature Solution-Processed High-κ Gate Dielectrics Using Organic–Inorganic TiO2 Hybrid Nanoparticles;Nanomaterials;2024-03-08
3. Hafnium Aluminate–Polymer Bilayer Dielectrics for Organic Light-Emitting Transistors (OLETs);ACS Applied Electronic Materials;2024-02-02
4. Reactive magnetron sputtered aluminum titanate high-к dielectric films for MIM devices;Applied Physics A;2023-10-25
5. Experimental Formation and Mechanism Study for Super-High Dielectric Constant AlOx/TiOy Nanolaminates;Nanomaterials;2023-04-02
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3