Compositional, electrical and thermal properties of nonstoichiometric titanium oxide thin films for MEMS bolometer applications

Author:

Yadav Isha,Jain Surbhi,Joshi Shalik Ram,Goyal Anshu,Tomar Monika,Gupta Sudha,Dutta Shankar,Chatterjee Ratnamala

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference31 articles.

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