Author:
Henttinen K.,Suni I.,Lau S. S.
Subject
Physics and Astronomy (miscellaneous)
Cited by
41 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Hydrogen Ion Implantation Induced Cutting Behavior Variation in Plunge Cutting of the Monocrystalline Silicon;Nanomanufacturing and Metrology;2021-01-28
2. Study of the effect of H implantation and annealing on LiTaO3 surface blistering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-01
3. Defect formation and thermal evolution in H and O co-implanted Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-11
4. Effects of homogenous loading on silicon direct bonding;Applied Surface Science;2011-06
5. Bonding;Introduction to Microfabrication;2010-11-09