Dielectric properties of Ta2O5–ZrO2 polycrystalline ceramics
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366873
Reference10 articles.
1. UV-O/sub 3/ and dry-O/sub 2/: Two-step-annealed chemical vapor-deposited Ta/sub 2/O/sub 5/ films for storage dielectrics of 64-Mb DRAMs
2. Effects of additive elements on electrical properties of tantalum oxide films
3. Enhancement of the dielectric constant of Ta2O5through substitution with TiO2
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