Low‐temperature SOI (Si‐on‐insulator) formation by lateral solid‐phase epitaxy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341565
Reference19 articles.
1. Solid-Phase Lateral Epitaxial Growth onto Adjacent SiO2Film from Amorphous Silicon Deposited on Single-Crystal Silicon Substrate
2. Solid‐phase lateral epitaxy of chemical‐vapor‐deposited amorphous silicon by furnace annealing
3. Lateral solid phase epitaxy of amorphous Si films on Si substrates with SiO2patterns
4. Amorphous‐Si/crystalline‐Si facet formation during Si solid‐phase epitaxy near Si/SiO2 boundary
5. On the Mechanisms of Lateral Solid Phase Epitaxial Growth of Amorphous Si Films Evaporated on SiO2Patterns
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