Effect of matrix composition and impact angle on the fractional ion yield of Be+sputtered from oxygen‐bombarded silicon and compound semiconductors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343181
Reference23 articles.
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3. Matrix calibration for the quantitative analysis of layered semiconductors by secondary ion mass spectrometry
4. Oxide bond energies for the calibration of matrix effects in secondary ion mass spectrometry
5. Fractional secondary ion yields of Be, Zn, Cr and Si in InP, GaInAs and Ga1−xAlxAs
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1. Use of cluster secondary ions for minimization of matrix effects in the SIMS depth profiling of La/B4C multilayer nanostructures;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2010-10
2. Secondary ion yields of C, Si, and Ge in InP, and Cs surface density and concentration, in SIMS;Surface Science;2002-09
3. Ion-induced electron emission as a means of studying energy- and angle-dependent compositional changes of solids bombarded with reactive ions;Surface Science;1999-01
4. Influence of the Deposition Conditions on the Properties of Amorphous Germanium Nitrogen Alloys;physica status solidi (b);1995-12-01
5. Ion yield effects in the SIMS analysis of silicon delta-doped layers in GaAs;Surface and Interface Analysis;1995-09
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