Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1884387
Reference7 articles.
1. Proceedings of SPIE;Mackay R. Scott,2004
2. Proceedings of the Second International EUVL Symposium,2003
3. Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma
4. Caractérisation des surfaces par réflexion rasante de rayons X. Application à l'étude du polissage de quelques verres silicates
5. X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
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