Large open-circuit voltage improvement by rapid thermal annealing of evaporated solid-phase-crystallized thin-film silicon solar cells on glass
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1921352
Reference8 articles.
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3. Modeling of boron diffusion in polysilicon-on-silicon structures using a rapid thermal anneal step for ultra-shallow junction formation
4. Rapid thermal processing of high-efficiency silicon solar cells with controlled in-situ annealing
5. Phosphorus diffusion from a spin-on doped glass (SOD) source during rapid thermal annealing
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