Transport properties of polycrystalline silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.324477
Reference9 articles.
1. Chemical Vapor Deposited Polycrystalline Silicon
2. Dependence of resistivity on the doping level of polycrystalline silicon
3. Hall Mobility in Chemically Deposited Polycrystalline Silicon
4. Deposition of Polycrystalline Silicon by Pyrolysis of Silane in Argon
5. The electrical properties of polycrystalline silicon films
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