Plasma etching of Ti in fluorine‐containing feeds
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350679
Reference15 articles.
1. Fabrication and characterization of titanium-indiffused proton-exchanged optical waveguides in Y-LiNbO_3
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3. Spectroscopic diagnostics of CF4‐O2 plasmas during Si and SiO2 etching processes
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