1. H. Abe, Proceedings of the Third International Symposium on Plasma Chemistry, RT‐5, Limoges, July, 1977 (unpublished).
2. C. J. Mogab, J. Electrochem. Soc. 124, 1262 (1977).JESOAN0013-4651
3. C. J. Mogab, A. C. Adams, and D. L. Flamm, J. Appl. Phys. 49, 3796 (1978).JAPIAU0021-8979
4. H. F. Winters, J. W. Coburn, and E. Kay, J. Appl. Phys. 48, 4973 (1977).JAPIAU0021-8979
5. W. R. Harshbarger, T. A. Miller, P. Norton, and R. A. Porter, Appl. Spectrosc. 31, 201 (1977).APSPA40003-7028