Detection of atomic oxygen: Improvement of actinometry and comparison with laser spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1315332
Reference24 articles.
1. Characterization of a radio‐frequency discharge used for downstream plasma oxidation of Si
2. Atomic oxygen radio-frequency source and its application to the treatment of mixed valence copper oxide thin films
3. On the role of atomic oxygen in the etching of organic polymers in a radio‐frequency oxygen discharge
4. Radio frequency hollow cathode discharge for large‐area double‐sided foil processing
5. Absolute two-photon absorption and three-photon ionization cross sections for atomic oxygen
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