Small angle x-ray scattering for measuring pore-size distributions in porous low-κ films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1539546
Reference8 articles.
1. Properties of nanoporous silica thin films determined by high-resolution x-ray reflectivity and small-angle neutron scattering
2. Determination of pore-size distribution in low-dielectric thin films
3. Probing capped and uncapped mesoporous low-dielectric constant films using positron annihilation lifetime spectroscopy
4. Determination of pore size distribution in thin films by ellipsometric porosimetry
5. X-ray and neutron scattering from rough surfaces
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