Short‐range order, microstructure and their correlation with light‐induced degradation in hydrogenated amorphous silicon deposited at high growth rates by cathode heating technique
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357239
Reference20 articles.
1. Effect of microvoids on initial and light‐degraded efficiencies of hydrogenated amorphous silicon alloy solar cells
2. Control of powder formation in silane discharge by cathode heating and hydrogen dilution for high‐rate deposition of hydrogenated amorphous silicon thin films
3. Monte‐Carlo simulation of electron properties in rf parallel plate capacitively coupled discharges
4. Dopant-atom-induced disorder in hydrogenated amorphous silicon: Raman studies
5. Microvoids in amorphous Si1−xCx:H alloys studied by small‐angle x‐ray scattering
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1. Role of Ar dilution of SiH4/PH3 gas mixture on PECVD based film growth process, hydrogen bonding configuration, and optical properties of n-type a-Si:H thin films;Chemical Physics;2023-11
2. Structural Order and Staebler–Wronski Effect in Hydrogenated Amorphous Silicon Films and Solar Cells;IEEE Journal of Photovoltaics;2014-01
3. Light induced changes in the amorphous—crystalline silicon heterointerface;Journal of Applied Physics;2013-09-28
4. GISAXS and ATR-FTIR Studies on Stress-Induced Microstructure Evolution of a-Si:H under H 2 Plasma Exposure;Chinese Physics Letters;2012-10
5. High rate deposition of microcrystalline silicon films using jet-type inductively coupled plasma chemical vapor deposition;Vacuum;2012-02
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