Single-step maskless nano-lithography on glass by femtosecond laser processing-Reference-Cited by-同舟云学术

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Single-step maskless nano-lithography on glass by femtosecond laser processing

Published:2020-04-30 Issue:16 Volume:127 Page:163102
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zhang Jihua¹^ORCID,Cong Cong¹,Guo Chunlei¹^ORCID

Affiliation:

1. The Institute of Optics, University of Rochester, Rochester, New York 14627, USA

Funder

National Science Foundation

Defense Advanced Research Projects Agency

Army Research Office

Bill and Melinda Gates Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.5142700

Reference41 articles.

1. Optical lithography—present and future challenges

2. E-beam lithography for micro-/nanofabrication

3. Review: Developments in micro/nanoscale fabrication by focused ion beams

4. Nanoimprint Lithography: Methods and Material Requirements

5. Nanomachining by Colloidal Lithography

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Imaging Dynamics of Femtosecond Laser-Induced Surface Nanostructuring;Springer Series in Optical Sciences;2023

2. Laser-induced periodic surface structured electrodes with 45% energy saving in electrochemical fuel generation through field localization;Opto-Electronic Advances;2022

3. Effect of temperature on the SU ‐8 photoresist filling behavior during thermal nanoimprinting;Polymer Engineering & Science;2021-07-26

4. Rapid Fabrication of 2-D Magnetic Microstructures by Laser Direct Writing (LDW);IEEE Transactions on Magnetics;2021-07

5. Quo Vadis LIPSS?—Recent and Future Trends on Laser-Induced Periodic Surface Structures;Nanomaterials;2020-09-30

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