Effect of temperature on the SU ‐8 photoresist filling behavior during thermal nanoimprinting-Reference-Cited by-同舟云学术

Effect of temperature on the SU ‐8 photoresist filling behavior during thermal nanoimprinting

Published:2021-07-26 Issue:8 Volume:61 Page:2222-2229
ISSN:0032-3888
Container-title:Polymer Engineering & Science
language:en
Short-container-title:Polym Eng Sci

Author:

Sun Lei¹^ORCID,Zou Helin²³,Sang Shengbo¹

Affiliation:

1. MicroNano System Research Center Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education & College of Information Engineering, Taiyuan University of Technology Jinzhong China

2. Key Laboratory for Precision and Non‐traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian China

3. Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province Dalian University of Technology Dalian China

Funder

National Natural Science Foundation of China

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pen.25751

Reference36 articles.

1. Thermoplastic nanofluidic devices for identifying abasic sites in single DNA molecules

2. Nanochannel-Confined TAMRA-Polypyrrole Stained DNA Stretching by Varying the Ionic Strength from Micromolar to Millimolar Concentrations

3. On-Chip Stretching, Sorting, and Electro-Optical Nanopore Sensing of Ultralong Human Genomic DNA

4. Nanopores and Nanochannels: From Gene Sequencing to Genome Mapping

5. Genetic diversity of oolong tea (Camellia sinensis) germplasms based on the nanofluidic array of single-nucleotide polymorphism (SNP) markers

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