Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.353193
Reference13 articles.
1. Numerical modeling of low-pressure RF plasmas
2. Electron heating in low‐pressure rf glow discharges
3. Electron heating mechanisms in helium rf glow discharges: A self-consistent kinetic calculation
4. Modulation of Electron Velocity Distribution Function by Moving Cathode Sheath in a Low-Pressure rf Discharge
5. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas;Journal of Vacuum Science & Technology B;2024-07-01
2. Physics of High-Density Radio Frequency Capacitively Coupled Plasma with Various Electrodes and Its Applications;Plasma Science and Technology - Basic Fundamentals and Modern Applications;2019-02-27
3. Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing;Plasma Chemistry and Plasma Processing;2017-09-14
4. Observation of radio frequency ring-shaped hollow cathode discharge plasma with MgO and Al electrodes for plasma processing;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2014-05
5. Radio-frequency magnetized ring-shaped hollow cathode discharge plasma for low-pressure plasma processing;Vacuum;2014-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3