Electron heating in low‐pressure rf glow discharges
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102604
Reference21 articles.
1. A Continuum Model of DC and RF Discharges
2. Fluid model simulations of a 13.56‐MHz rf discharge: Time and space dependence of rates of electron impact excitation
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4. Large‐signal time‐domain modeling of low‐pressure rf glow discharges
5. Numerical model of rf glow discharges
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