Influence of in situ applied ultrasound during Si+ implantation in SiO2 on paramagnetic defect generation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3369041
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2. Influence of γ-irradiation and ultrasound treatment on current mechanism in Au-SiO2-Si structure;Solid-State Electronics;2020-03
3. Acousto–defect interaction in irradiated and non-irradiated silicon n+–p structures;Journal of Applied Physics;2018-04-28
4. Ion-Beam-Induced Defects in CMOS Technology: Methods of Study;Ion Implantation - Research and Application;2017-06-14
5. On the mechanism of ultrasonic loading effect in silicon-based Schottky diodes;Ultrasonics;2016-03
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