Measurement of energy transfer at an isolated substrate in a pulsed dc magnetron discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2779287
Reference36 articles.
1. W. D. Westwood, in Physics of Thin Films, edited by M. H. Francombe and J. L. Vossen (Academic, Boston, 1989), pp. 1–79.
2. Reactive d.c. high-rate sputtering as production technology
3. Reactive sputtering of highly insulating layers with twin-cathode and mid-frequency power supply
4. Recent aspects concerning DC reactive magnetron sputtering of thin films: a review
5. Pulsed magnetron sputter technology
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