Decomposition of silane on Si(111)‐(7×7) and Si(100)‐(2×1) surfaces below 500 °C
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.457912
Reference34 articles.
1. A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques III. Nucleation rate measurements and the effect of oxygen on initial growth behaviour
2. The surface chemistry of the thermal cracking of silane on silicon (111)
3. The Kinetics of Silicon Deposition on Silicon by Pyrolysis of Silane
4. Silicon homoepitaxial thin films via silane pyrolysis: A HEED and Auger electron spectroscopy study
5. Reactive sticking coefficients for silane and disilane on polycrystalline silicon
Cited by 124 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Point defect formation near the epitaxial Ge(001) growth surface and the impact on phosphorus doping activation;Journal of Applied Physics;2021-09-28
2. An improved scanning probe-based lithography: Site-controlled formation of self-assembled film as an etch mask;Microelectronic Engineering;2021-05
3. Lattice kinetic Monte Carlo simulation of epitaxial growth of silicon thin films in H 2 /SiH 4 chemical vapor deposition systems;Thin Solid Films;2017-07
4. Modeling on Hydrogen Effects for Surface Segregation of Ge Atoms during Chemical Vapor Deposition of Si on Si/Ge Substrates;KOREAN CHEM ENG RES;2017
5. Competition between uncatalyzed and catalyzed growth during the plasma synthesis of Si nanowires and its role on their optical properties;Journal of Applied Physics;2013-06-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3