Effect of hydrogen on surface roughening during Si homoepitaxial growth
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110100
Reference12 articles.
1. Effect of image potential and charge exchange on the trajectory of fast protons in surface scattering
2. Activation energy for surface diffusion of Si on Si(001): A scanning-tunneling-microscopy study
3. Limiting thickness h_{epi} for epitaxial growth and room-temperature Si growth on Si(100)
4. Hydrogen desorption from the monohydride phase on Si(100)
5. Dynamic Scaling of Growing Interfaces
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