Biaxial Young’s modulus of silicon carbide thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109441
Reference15 articles.
1. Characterization ofa‐SiC:H films produced in a standard plasma enhanced chemical vapor deposition system for x‐ray mask application
2. SiC membranes for x-ray masks produced by laser ablation deposition
3. A 100-nm patterned x-ray mask technology based on amorphous SiC membranes
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2. Influence of Si–C bond density on the properties of a-Si1−xCx thin films;Applied Surface Science;2012-01
3. Development of amorphous SiC for MEMS-based microbridges;SPIE Proceedings;2007-02-08
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5. Characterization of the elastic properties of amorphous silicon carbide thin films by acoustic microscopy;Journal of Non-Crystalline Solids;1997-02
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