1. Base Technology, Technology, GlobalWafers Japan Co., Ltd., 6-861-5, Seiro-machi Higashiko, Kitakanbara-gun, Niigata 957-0197, Japan
2. Regional Cooperative Research Organization, Okayama Prefectural University, 111 Kuboki, Soja, Okayama 719-1197, Japan
3. Faculty of Computer Science and System Engineering, Okayama Prefectural University, 111 Kuboki, Soja, Okayama 719-1197, Japan